Home“Self-Configuring CMOS Microsystems ”
Dr. Gary K. Fedder
Wednesday, September 30, 2009
11:00am to 12:00pm
337 Towne
Abstract:
My research for the past 15 years has revolved around monolithic integration of MEMS with CMOS and development of the requisite design and modeling paradigm to create complex on-chip microsystems. The “More than Moore” trend in the microelectronics industry is accelerating the pace of advanced packaging, which will become increasingly exploited for MEMS integration and blur the lines between monolithic integration and system in package. Integration becomes a necessity for multi-component microsystems, where wiring between MEMS and electronics scales with MEMS component count. Two exemplary systems that we have recently started working on are micro-instrumented scanning probe arrays for tip-based nanomanufacturing and self-healing resonant mixer-filters for RF front-ends. A cross-cutting feature of these otherwise very different systems is the need for self-configuration and control in the presence of manufacturing and environmental variability. These are general attributes that hold promise of providing high manufacturing yield, resiliency and redundancy for critical applications.
Biography: GARY K. FEDDER is Director of the Institute of Complex Engineered Systems, Howard M. Wilkoff Professor of Electrical and Computer Engineering and Professor in The Robotics Institute at Carnegie Mellon University. He received his B.S. and M.S. degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his Ph.D. degree from U. C. Berkeley in 1994. From 1984 to 1989, he worked at Hewlett-Packard on circuit design and printed-circuit modeling. He is an IEEE Fellow and received the 1994 AIME Electronic Materials Society Ross Tucker Award, the 1996 Carnegie Institute of Technology G.T. Ladd Award, and the 1996 NSF CAREER Award. He currently serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems, on the editorial boards of the IoP Journal of Micromechanics and Microengineering and IET Micro & Nano Letters and as co-editor of the Wiley-VCH Advanced Micro- and Nanosystems book series. He has contributed to over 160 research publications and holds several patents in the MEMS area. His research interests include microsensor and microactuator design and modeling, integrated MEMS manufactured in CMOS processes and structured design methodologies for MEMS. As the general chair of the IEEE Sensors Conference in 2010, he cordially invites you to participate in the conference on the Kona coast of Hawaii next November!